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Micro and nano fabrication : tools and processes /

Gatzen, Hans H.

Micro and nano fabrication : tools and processes / Hans H. Gatzen ; Volker Saile and Jurg Leuthold. - London : Springer, c2015. - xxvi, 519 p. : ill. ; 25 cm.

Includes references and index.

ISBN: 9783662443941 (hbk.)

LCCN: 2014948737

Subjects--Topical Terms:
Microelectromechanical systems.

Dewey Class. No.: 620.5 / GAT

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