Micro and nano fabrication : tools and processes / Hans H. Gatzen ; Volker Saile and Jurg Leuthold.

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TextPublication details: London : Springer, c2015.Description: xxvi, 519 p. : ill. ; 25 cmISBN:

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Item type	Current library	Call number	Materials specified	Status	Date due	Barcode
Books	Reference Collection	620.5 GAT (Browse shelf(Opens below))		1		LC-97715

Includes references and index.

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