Handbook of semiconductor manufacturing technology / (Record no. 36913)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 007340000a22002290004500 |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20251028083525.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 061219s2008 flua bf 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 2006102599 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 9781574446753 (hbk.) |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK7871.85 |
| Item number | .H3335 2008 |
| 082 00 - DEWEY DECIMAL CLASSIFICATION NUMBER | |
| Classification number | 621.38152 |
| Edition information | 22 |
| Item number | DOE |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of semiconductor manufacturing technology / |
| Statement of responsibility, etc. | edited by Robert Doering, Yoshio Nishi. |
| 250 ## - EDITION STATEMENT | |
| Edition statement | 2nd ed. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boca Raton : |
| Name of publisher, distributor, etc. | CRC Press, |
| Date of publication, distribution, etc. | c2008. |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 1 v. (various pagings) : |
| Other physical details | ill. ; |
| Dimensions | 27 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductor industry |
| Topical term or geographic name entry element | Semiconductors |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Doering, Robert, |
| Personal name | Nishi, Yoshio, |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Koha item type | Reference |
No items available.