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Handbook of semiconductor manufacturing technology / edited by Robert Doering, Yoshio Nishi.

Contributor(s): Publication details: Boca Raton : CRC Press, c2008.Edition: 2nd edDescription: 1 v. (various pagings) : ill. ; 27 cmISBN:
  • 9781574446753 (hbk.)
Subject(s): DDC classification:
  • 621.38152 22 DOE
LOC classification:
  • TK7871.85 .H3335 2008
Item type: Reference
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Includes bibliographical references and index.

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