Scaling issues and design of MEMS / Salvatore Baglio ; Salvatore Castorina & Nicolo Savalli.

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Publication details: Chichester, West Sussex : John Wiley, c2007.Description: xiii, 229 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Materials specified	Status	Date due	Barcode
Books	Reference Collection	620.5 BAG (Browse shelf(Opens below))		Available		LC-68691

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Previous	620.44 VIC Surface analysis : the principal techniques /	620.497 NAT Yugoslavin Technology profile /	620.5 ASH Nanomaterials, nanotehnologies and design : an introduction for engineers and architects /	620.5 BAG Scaling issues and design of MEMS /	620.5 DIW The nanoscope /	620.5 DIW The nanoscope /	620.5 DIW The nanoscope /	Next

Includes references & index.

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