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Introductory MEMS : fabrication and applications / Thomas M. Adams & Richard A. Layton.

By: Contributor(s): Material type: TextTextPublisher number: 12102532Publication details: New York : Springer, 2012.Description: xv, 444 p. : ill. ; 24 cmISBN:
  • 9788132206637 (pbk.)
Subject(s): DDC classification:
  • 621.381 ADA
LOC classification:
  • TK7875 .A33 2010
Item type:
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Includes appendixes ; glossary & references & index.

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