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Emerging semiconductor technology : a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.

By: Contributor(s): Material type: TextTextPublication details: Philadelphia, PA : American Society for Testing and Materials, c1987.Description: 704 p. : illISBN:
  • 9780803104594 (hbk.)
Subject(s): DDC classification:
  • 621.38152  EME
Item type: Books
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Item type Current library Collection Call number Materials specified Copy number Status Date due Barcode
Books Books Lending Collection Electronics Engineering 621.38152 EME (Browse shelf(Opens below)) ES-940 Available LC-41828

Papers presented at the Fourth International Symposium on Semiconductor Processing.

"ASTM publication code number (PCN) 04-960000-46."

Includes bibliographies and indexes.

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