Emerging semiconductor technology : a symposium / sponsored by ASTM Committee F-1 on Electronics, San Jose, CA, 28-31 Jan. 1986 ; Dinesh C. Gupta and Paul H. Langer, editors.
Material type:
TextPublication details: Philadelphia, PA : American Society for Testing and Materials, c1987.Description: 704 p. : illISBN: - 9780803104594 (hbk.)
- 621.38152 EME
Books
| Item type | Current library | Collection | Call number | Materials specified | Copy number | Status | Date due | Barcode | |
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Books
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Lending Collection | Electronics Engineering | 621.38152 EME (Browse shelf(Opens below)) | ES-940 | Available | LC-41828 |
Papers presented at the Fourth International Symposium on Semiconductor Processing.
"ASTM publication code number (PCN) 04-960000-46."
Includes bibliographies and indexes.
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