Your search returned 14 results.

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	1.		Microfabrication and nanomanufacturing / edited by Mark J. Jackson. by Jackson, Mark J Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton, FL : CRC/Taylor & Francis, c2006 Availability: Items available for loan: Mechatronics Engineering (1)Call number: 620.5 JAC. Place hold
	2.		MEMS : applications / edited by Mohamed Gad-el-Hak. by Gad-el-Hak, Mohamed, 1945- Series: The MEMS handbook Edition: 2nd ed. Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton, FL : CRC Press/Taylor & Francis, 2006 Availability: Items available for reference: Reference Collection: Not for loan (1)Call number: 621.381 MOH.
	3.		FEM and micromechatronics with ATILA software / Kenji Uchino by Uchino, Kenji Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton : CRC Press, 2008 Availability: Items available for loan: Reference Collection (1)Call number: 621 UCH. Place hold
	4.		Scaling issues and design of MEMS / Salvatore Baglio ; Salvatore Castorina & Nicolo Savalli. by Baglio, Salvatore Castorina, Salvatore Savalli, Nicolo Publication details: Chichester, West Sussex : John Wiley, c2007 Online resources: Table of contents only Availability: Items available for loan: Reference Collection (1)Call number: 620.5 BAG. Place hold
	5.		Photonic MEMS devices : design, fabrication and control / Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.]. by Liu, Ai-Qun Series: Optical science and engineering series ; 136 Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boca Raton, FL : CRC Press, c2009 Online resources: Publisher description Availability: Items available for loan: Electrical Engineering (1)Call number: 621.381 LIU. Lending Collection (4)Call number: 621.381 LIU, ... Reference Collection (1)Call number: 621.381 LIU. Place hold
	6.		Micro and nano fabrication : tools and processes / Hans H. Gatzen ; Volker Saile and Jurg Leuthold. by Gatzen, Hans H Saile, Volker. Leuthold, Jurg Material type: Text; Format: print ; Literary form: Not fiction Publication details: London : Springer, c2015 Availability: Items available for reference: Reference Collection: Not for loan (1)Call number: 620.5 GAT.
	7.		Mechatronic systems : fundamentals / Rolf Isermann by Isermann, Rolf Material type: Text Publication details: London : Springer, 2005 Availability: Items available for loan: Mechatronics Engineering (1)Call number: 629.892 ISE. Place hold
	8.		Microfabrication and nanomanufacturing / edited by Mark J. Jackson. by Jackson, Mark J Publication details: Boca Raton, FL : CRC/Taylor & Francis, c2006 Availability: No items available.
	9.		MEMS : applications / edited by Mohamed Gad-el-Hak. by Gad-el-Hak, Mohamed, 1945- Series: The MEMS handbook Edition: 2nd ed. Publication details: Boca Raton, FL : CRC Press/Taylor & Francis, 2006 Availability: No items available.
	10.		FEM and micromechatronics with ATILA software / Kenji Uchino by Uchino, Kenji Publication details: Boca Raton : CRC Press, 2008 Availability: No items available.
	11.		Scaling issues and design of MEMS / Salvatore Baglio ; Salvatore Castorina & Nicolo Savalli. by Baglio, Salvatore Castorina, Salvatore Savalli, Nicolo Publication details: Chichester, West Sussex : John Wiley, c2007 Online resources: Table of contents only Availability: No items available.
	12.		Photonic MEMS devices : design, fabrication and control / Ai-Qun Liu ; co-authors, Xuming Zhang ... [et al.]. by Liu, Ai-Qun Series: Optical science and engineering series ; 136 Publication details: Boca Raton, FL : CRC Press, c2009 Online resources: Publisher description Availability: No items available.
	13.		Micro and nano fabrication : tools and processes / Hans H. Gatzen ; Volker Saile and Jurg Leuthold. by Gatzen, Hans H Saile, Volker. Leuthold, Jurg Publication details: London : Springer, c2015 Availability: No items available.
	14.		Mechatronic systems : fundamentals / Rolf Isermann by Isermann, Rolf Publication details: London : Springer, 2005 Availability: No items available.

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